Mathematical modeling the process of gas flow in the turbomolecular pump using the Cercignani-Lampis gas-surface interaction model
نویسندگان
چکیده
In this paper, the process of gas flow in path a turbomolecular vacuum pump using Cercignani-Lampis (CL) model was simulated. CL used as new boundary conditions when calculating transition probability. The test particle method (Monte Carlo method) simulation. calculation molecules probability through blade channel forward and reverse directions, resulting probability, compression ratio made.
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ژورنال
عنوان ژورنال: Trudy Instituta sistemnogo programmirovaniâ
سال: 2022
ISSN: ['2079-8156', '2220-6426']
DOI: https://doi.org/10.15514/ispras-2022-34(6)-16